Profilometry With Enhanced Accuracy Using Differential Structured Illumination Microscopy

The conventional structured illumination micro-scopy (SIM) reconstructs the surface through determining the focal position from the modulation depth response (MDR) using the Gaussian fitting. In this letter, an innovative differential structured illumination microscopy (DSIM) is developed. This tech...

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Bibliographic Details
Published in:IEEE photonics technology letters 2019-07, Vol.31 (13), p.1017-1020
Main Authors: Xie, Zhongye, Tang, Yan, Liu, Xi, Liu, Junbo, He, Yu, Hu, Song
Format: Article
Language:English
Subjects:
Illumination
Microscopy
Modulation
Position measurement
Semiconductor device measurement
Surface topography
thickness measurement
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Summary:The conventional structured illumination micro-scopy (SIM) reconstructs the surface through determining the focal position from the modulation depth response (MDR) using the Gaussian fitting. In this letter, an innovative differential structured illumination microscopy (DSIM) is developed. This technique exploits the position at the linear portion of the MDR to achieve the measurements. To extract this position, two detectors are used to generate the differential modulation depth response (DMDR). After that, the zero point of the DMDR for each pixel is extracted by the linear fitting technique. The experiments and theoretical analysis are elaborated to verify that the DSIM can greatly enhance the axial accuracy, providing that the potential to be applied in high-precision measurement.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2019.2916370