Study of Metal Atom Ionization in a Hollow-Cathode Magnetron

The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using...

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Bibliographic Details
Published in:Plasma physics reports 2019-06, Vol.45 (6), p.592-601
Main Authors: Tsargorodtsev, Yu. P., Poluektov, N. P., Usatov, I. I., Evstigneev, A. G., Kozlovskaya, E. P., Amelkin, O. O.
Format: Article
Language:English
Subjects:
Atomic
Cathodes
Discharge
Emission spectra
Ionization
Low-Temperature Plasma
Molecular
Optical and Plasma Physics
Physics
Physics and Astronomy
Plasma
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Summary:The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using an optical probe. The plasma parameters in the dc and pulsed discharges were determined by means of a Langmuir probe. The goal of this research was to find the position of the ionization region and reveal the mechanism of ionization of sputtered target atoms.
ISSN:1063-780X
1562-6938
DOI:10.1134/S1063780X19050131