A Low Power Cantilever-Based Metal Oxide Semiconductor Gas Sensor

This letter, for the first time, reports a novel metal oxide semiconductor (MOS) gas sensor based on a single cantilever. The extremely brief Platinum microheater without any coil, is on a 10 μm wide cantilever, which shows very low static power consumption and fast heating response. Sensors were fa...

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Bibliographic Details
Published in:IEEE electron device letters 2019-07, Vol.40 (7), p.1178-1181
Main Authors: Xie, Dongcheng, Chen, Dongliang, Peng, Shufeng, Yang, Yujie, Xu, Lei, Wu, Feng
Format: Article
Language:English
Subjects:
Beams (structural)
cantilever
Coils
Ethanol
Gas detectors
gas sensor
Gas sensors
Heating
Heating systems
low power consumption
Mechanical systems
MEMS
Metal oxide semiconductors
Metal oxides
Microelectromechanical systems
MOS
Platinum
Power consumption
Power demand
Resistance
Sensors
Temperature sensors
Tin dioxide
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Summary:This letter, for the first time, reports a novel metal oxide semiconductor (MOS) gas sensor based on a single cantilever. The extremely brief Platinum microheater without any coil, is on a 10 μm wide cantilever, which shows very low static power consumption and fast heating response. Sensors were fabricated on a four inch Si wafer using typical micro-electro-mechanical system (MEMS) process, and SnO 2 was chosen as the sensing material. Test results indicate that the static power consumption is only 2.96 mW. With this applied power, the sensor can reach 400 °C and the heating-up time is just 260 μs. Both of them are enormously improved, comparing with the MEMS MOS gas sensors with suspended membrane supported by slender beams. The sensor shows a good linear characteristic to 0-10 ppm ethanol. Moreover, due to the single cantileverstructure, ten sensors can be fabricated inside a die of 1 mm 2 , improving the integration by an order of magnitude.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2019.2914271