The investigation of integrated SAW strain sensor based on AlN/TC4 structure

[Display omitted] •Layered SAW strain sensor was integrated on TC4 component without bond materials.•The strain transfer ratio of the sensor reaches 0.992 in FEM simulation.•The strain hysteresis error of the SAW devices is limited in 0.32% at 25 °C.•The integrated sensor shows good strain character...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2019-07, Vol.293, p.14-20
Main Authors: Shu, Lin, Wang, Xuemin, Li, Ling, Yan, Dawei, Peng, Liping, Fan, Long, Wu, Weidong
Format: Article
Language:English
Subjects:
Aluminum nitride
Computer simulation
Finite element method
High temperature
Hysteresis
Integrated sensor
Metal beams
Metal substrate
Metals
Offset printing
Photolithography
Sensitivity
Sensors
Strain
Surface acoustic wave
Surface acoustic wave devices
Titanium base alloys
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Summary:[Display omitted] •Layered SAW strain sensor was integrated on TC4 component without bond materials.•The strain transfer ratio of the sensor reaches 0.992 in FEM simulation.•The strain hysteresis error of the SAW devices is limited in 0.32% at 25 °C.•The integrated sensor shows good strain characteristics from 20 °C to 400 °C. This paper reports a novel strain sensor integrated on metal component. High-performance SAW strain sensor is embed on the layered AlN/TC4(Ti-6Al-4 V) structure by lift-off photolithography techniques, while the AlN film is directly deposited on the TC4 metal beam without bonding materials. The strain characteristics of the integrated sensor have been simulated and experimental investigated. The finite element modeling (FEM) simulation reveals that the strain transfer ratio (STR) of the sensor reaches 0.992 at 20 °C. The experimental results show that the strain sensitivity of the sensor reaches 1.61 ppm/με with a deviation of 0.56%. The strain hysteresis error of the SAW devices is about 0.32% at 25 °C. The temperature behavior in strain sensitivity and hysteresis errors have also been studied. Though negative effects caused by increasing of operation temperature on its strain response, the integrated SAW sensor shows better performance than the reported one in a wide range of operation temperature. The prepared layered SAW sensor integrated with TC4 alloy has great potential applications in high temperature harsh environment.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2019.04.012