The diffusion of Pt in BST films on Pt/Ti/SiO2/Si substrate by sol-gel method

Barium strontium titanate (Ba0.65Sr0.35TiO3) ferroelectric thin films have been prepared by sol-gel method on Pt/Ti/SiO2/Si substrate. The X-ray diffraction (XRD) pattern indicated that the films were a polycrystalline perovskite structure and the atomic force microscope (AFM) image showed that the...

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Bibliographic Details
Published in:Journal of sol-gel science and technology 2006-09, Vol.39 (3), p.293-298
Main Authors: Hu, Wencheng, Yang, Chuanren, Zhang, Wanli, Liu, Guijun, Dong, Dong
Format: Article
Language:English
Subjects:
Atomic force microscopes
Atomic force microscopy
Atomic structure
Barium strontium titanates
Chemistry
Colloidal gels. Colloidal sols
Colloidal state and disperse state
Crystallites
Diffraction patterns
Diffusion
Exact sciences and technology
Ferroelectric materials
Ferroelectricity
General and physical chemistry
Grain boundary diffusion
Microscopes
Perovskite structure
Perovskites
Photoelectrons
Silicon dioxide
Silicon substrates
Sol-gel processes
Thin films
Titanium
X ray photoelectron spectroscopy
X-ray diffraction
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Summary:Barium strontium titanate (Ba0.65Sr0.35TiO3) ferroelectric thin films have been prepared by sol-gel method on Pt/Ti/SiO2/Si substrate. The X-ray diffraction (XRD) pattern indicated that the films were a polycrystalline perovskite structure and the atomic force microscope (AFM) image showed that the crystallite size and the root mean square roughness (RMS) were 90 nm and 3.6 nm, respectively. The X-ray photoelectron spectrum (XPS) images showed that Pt consisting in BST thin films was the metallic state, and the Auger electron spectroscopy (AES) analysed the Pt concentration in different depth profiles of BST thin films. The result displayed that the Pt diffusion in BST thin film is divided into two regions: near the BST/Pt interface, the diffusion type was volume diffusion, and far from the interface correspondingly, the diffusion type became grain boundary diffusion. In this paper, the previous researcher’s result was used to verify our conclusion.
ISSN:0928-0707
1573-4846
DOI:10.1007/s10971-006-7809-9