Spin Coating of Titanium Ethoxide Solutions

Titanium oxide films are used in anti-reflection interference filters. These layers can be deposited by spinning titanium ethoxide (TEOTi) solutions. By thorough hydrolysis of the TEOTi precursor, optically acceptable coatings can be made even when cured at temperatures below 150°C.The use of acetyl...

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Bibliographic Details
Published in:Journal of sol-gel science and technology 1997-01, Vol.8 (1-3), p.459-463
Main Authors: MJ van Bommel, Bernards, TNM
Format: Article
Language:English
Subjects:
Acetylacetone
Curing
Fluid filters
Hydrolysis
Morphology
Oxide coatings
Spin coating
Titanium
Titanium dioxide
Titanium ethoxide
Titanium oxides
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Description
Summary:Titanium oxide films are used in anti-reflection interference filters. These layers can be deposited by spinning titanium ethoxide (TEOTi) solutions. By thorough hydrolysis of the TEOTi precursor, optically acceptable coatings can be made even when cured at temperatures below 150°C.The use of acetylacetone to control the reactivity of a TEOTi solution is not suitable when curing the films at 150°C, because at this curing temperature the acetylacetone remains in the coating. A more suitable method to control the reactivity is by adjusting the H+ concentration of the solution. Besides the curing temperature the hydrolysis time of the TEOTi solution also has a major influence on the morphology of the final TiO2 layer.
ISSN:0928-0707
1573-4846
DOI:10.1023/A:1018381706632