LiCl-enhanced capacitive humidity-sensing properties of cadmium sulfide grown on silicon nanoporous pillar array

The extensive application of humidity sensors has greatly stimulated the study on high-performance humidity-sensing materials. In the paper, we report that a prototype humidity sensor was prepared by growing cadmium sulfide (CdS) on silicon nanoporous pillar array (Si-NPA) through a successive ionic...

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Bibliographic Details
Published in:Journal of materials science 2017-04, Vol.52 (7), p.3841-3848
Main Authors: Feng, Ming Hai, Wang, Wen Chuang, Li, Xin Jian
Format: Article
Language:English
Subjects:
Adsorption
Analysis
Cadmium
Cadmium compounds
Cadmium sulfide
Characterization and Evaluation of Materials
Chemistry and Materials Science
Classical Mechanics
Crystallography and Scattering Methods
Detection
Halides
Humidity
Linearity
Lithium
Lithium chloride
Lithium compounds
Materials Science
Original Paper
Polymer Sciences
Recovery time
Sensor arrays
Sensors
Silicon
Silicon substrates
Solid Mechanics
Submerging
Sulfides
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Summary:The extensive application of humidity sensors has greatly stimulated the study on high-performance humidity-sensing materials. In the paper, we report that a prototype humidity sensor was prepared by growing cadmium sulfide (CdS) on silicon nanoporous pillar array (Si-NPA) through a successive ionic layer adsorption and reaction method followed by immersing the samples in the solution of lithium chloride (LiCl). It was demonstrated that through the immersion treatment, the humidity-sensing properties including the response and its linearity, response and recovery time, hysteresis, and measuring reproducibility and stability were improved significantly. These results indicated that LiCl-immersed CdS/Si-NPA might be a promising material for fabricating humidity sensors applied to medium and low humidity range.
ISSN:0022-2461
1573-4803
DOI:10.1007/s10853-016-0641-x