Meshless analysis of piezoelectric devices

The sensor and actuator properties of piezoelectric materials make them well suited for applications in a variety of microelectromechanical systems (MEMS). Simulating the response of piezoelectric devices requires solving coupled electrical and mechanical partial differential equations. In this pape...

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Bibliographic Details
Published in:Computational mechanics 2001-01, Vol.27 (1), p.23-36
Main Authors: OHS, R. R, ALURU, N. R
Format: Article
Language:English
Subjects:
Actuators
Algorithms
Collocation methods
Computational techniques
Computer simulation
Exact sciences and technology
Finite element method
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interpolation
Mathematical analysis
Mathematical methods in physics
Mathematical models
Meshless methods
Microelectromechanical systems
Partial differential equations
Physics
Piezoelectricity
Transducers
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Summary:The sensor and actuator properties of piezoelectric materials make them well suited for applications in a variety of microelectromechanical systems (MEMS). Simulating the response of piezoelectric devices requires solving coupled electrical and mechanical partial differential equations. In this paper, we have implemented a meshless point collocation method (PCM) to solve the governing equations. Interpolation functions are constructed from a reproducing kernel approximation, and the governing equations are discretized using a collocation approach. PCM is implemented using either a relaxation algorithm or a fully-coupled algorithm. Comparisons between the two algorithms are given. To demonstrate the performance of PCM, the behavior of two static single-layer problems and a piezoelectric bimorph have been modeled. The bimorph analysis is extended to model a prototype MEMS device.
ISSN:0178-7675
1432-0924
DOI:10.1007/s004660000211