Patterned crack-free PZT thick films for micro-electromechanical system applications

The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a...

Full description

Saved in:
Bibliographic Details
Published in:International journal of advanced manufacturing technology 2007-05, Vol.33 (1-2), p.86-94
Main Authors: Dauchy, F., Dorey, R. A.
Format: Article
Language:English
Subjects:
Electrodes
Embedded structures
Etching
Lead zirconate titanates
Microelectromechanical systems
Multilayers
Piezoelectricity
Slurries
Sol-gel processes
Thick films
Thin films
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The fabrication and structuring of multilayer-thick film piezoelectric (PZT-lead zirconate titanate) structures, using composite sol-gel techniques and wet etching is described. The composite sol-gel technique involves producing a PZT powder/sol composite slurry which when spun down, yields films a few micrometres thick. Repeated layering and infiltration has been used to produce PZT films between 10 and 40 μm thick. Due to the low firing temperature (
ISSN:0268-3768
1433-3015
DOI:10.1007/s00170-007-0968-1