An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface

An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in...

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Bibliographic Details
Published in:Instruments and experimental techniques (New York) 2019-10, Vol.62 (4), p.568-572
Main Authors: Kostanovskiy, A. V., Pronkin, A. A., Zeodinov, M. G., Kostanovskaya, M. E.
Format: Article
Language:English
Subjects:
Carbon
Diamond-like carbon films
Electrical Engineering
Laboratory Techniques
Magnetron sputtering
Measurement Science and Instrumentation
Phase composition
Physical Chemistry
Physics
Physics and Astronomy
Product design
Thin films
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Summary:An apparatus for depositing thin carbon films in magnetron sputtering under the conditions of photoactivation of the film surface is described. Studies of the phase composition of films that were obtained under different operating conditions of the apparatus revealed the presence of carbon atoms in the sp 1 and sp 3 hybridized states. A diamond-like film, a film containing carbine, and a graphite film were obtained on this apparatus.
ISSN:0020-4412
1608-3180
DOI:10.1134/S0020441219030205