Salisbury screen optical color filter with ultra-thin titanium nitride film

Titanium nitride (TiN) is a metal-like refractory material that can be used as a substitution for metals in many applications. In this paper, we report the use of an ultra-thin TiN film in the Salisbury screen structure to spectral selectively absorb visible light for forming an optical color filter...

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Bibliographic Details
Published in:Applied optics (2004) 2019-08, Vol.58 (24), p.6700
Main Authors: Meng, Yan-Long, Tan, Jun, Xu, Kai, Chen, Jinnan, Jin, Guo-Jun, Sun, Ying, Wang, Ling-Li, Zuo, Zhen, Qin, Hou-Yun, Zhao, Yi, Guo, Junpeng
Format: Article
Language:English
Subjects:
Multilayers
Protective coatings
Refractory materials
Titanium nitride
Zinc oxide
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Summary:Titanium nitride (TiN) is a metal-like refractory material that can be used as a substitution for metals in many applications. In this paper, we report the use of an ultra-thin TiN film in the Salisbury screen structure to spectral selectively absorb visible light for forming an optical color filter. The ultra-thin TiN film functions as a partial reflector as well as a protection capping layer in the structure. Spectral selective perfect absorption color filters with TiN-ZnO-Al multilayer films were fabricated and characterized.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.58.006700