Nanowear of ultrathin TiN/NbN superlattices deposited on silicon

TiN/NbN ultrathin superlattices deposited on silicon by physical vapor deposition technique were tested. The test were performed for superlattices with constant thickness (5.84 nm) of NbN layer and varied thickness (2.2–13 nm) of TiN layer. The nanowear tests on 5 × 5 μm scan size were carried out....

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Bibliographic Details
Published in:Tribology letters 2005-02, Vol.18 (2), p.165-172
Main Authors: Wyrobek, Jerzy T., Wrzesinska, Hanna, Strom, Andrew, Rymuza, Zygmunt, Nowek, Andrzej
Format: Article
Language:English
Subjects:
Contact angle
Nanoindentation
Niobium nitride
Physical vapor deposition
Silicon
Superlattices
Thickness
Tribology
Ultrasonic testing
Wear resistance
Wetting
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Summary:TiN/NbN ultrathin superlattices deposited on silicon by physical vapor deposition technique were tested. The test were performed for superlattices with constant thickness (5.84 nm) of NbN layer and varied thickness (2.2–13 nm) of TiN layer. The nanowear tests on 5 × 5 μm scan size were carried out. The effect of the construction of the film on its wear resistance was observed. The specific energy of wear was estimated. The nanoscratch tests were performed additionally to estimate the friction force during the wear and to calculate the energy of friction. The results of the nanowear studies were also compared with the results of nanoindentation tests. The wetting studies by contact angles measurements were also carried out. The smallest wear was found for the thinnest TiN layer.
ISSN:1023-8883
1573-2711
DOI:10.1007/s11249-004-1772-9