Design and Trajectory Tracking of a Nanometric Ultra-Fast Tool Servo

This paper reports on the development of a piezo-actuated nanometric ultra-fast tool servo (NU-FTS) for nanocutting. For motion guidance, a flexure mechanism is especially designed using a novel kind of generalized flexure hinges with the notch profiles described by a rational Bezier curve. Both kin...

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Bibliographic Details
Published in:IEEE transactions on industrial electronics (1982) 2020-01, Vol.67 (1), p.432-441
Main Authors: Zhu, Zhiwei, Du, Hanheng, Zhou, Rongjing, Huang, Peng, Zhu, Wu-Le, Guo, Ping
Format: Article
Language:English
Subjects:
Beam theory (structures)
Couplings
Curves
Driving conditions
Euler-Bernoulli beams
Fasteners
Finite element method
Flexing
Kinematics
Multiobjective optimization
nanometric ultra-fast tool servo (NM-FTS)
piezo-actuated flexure mechanism
Servomotors
Shape
Stiffness
Strain
Tracking
Trajectories
trajectory preshaping
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Summary:This paper reports on the development of a piezo-actuated nanometric ultra-fast tool servo (NU-FTS) for nanocutting. For motion guidance, a flexure mechanism is especially designed using a novel kind of generalized flexure hinges with the notch profiles described by a rational Bezier curve. Both kinematics and dynamics properties of the mechanism are comprehensively modeled through a novel finite beam modeling method. With this model, the hinge is divided into a set of serially connected beams with constant cross sections. The equivalent stiffness and lumped moving mass of the mechanism are derived based on the Euler-Bernoulli beam theory. Taking advantage of the structure and performance model, the notch shape as well as the dimensions are optimized to achieve the specified criteria for the NU-FTS. Performance of the designed mechanism is verified through both finite-element analysis and practical testing on a prototype. Overall, the NU-FTS is demonstrated to have a stroke of 6 and 1.2 \mu m for the quasi-static and 10 kHz driving condition, respectively. Through dynamics inversion-based trajectory preshaping, a maximum following error around 25 and 50 nm is obtained for tracking a simple harmonic and a complicated trajectory, respectively.
ISSN:0278-0046
1557-9948
DOI:10.1109/TIE.2019.2896103