C-reactive protein detection based on ISFET structure with gate dielectric SiO2-CeO2

This paper considers a new biosensor based on p-channel ion sensitive field effect transistors (ISFET) as a sensitive platform for low concentration detection of C-reactive protein (CRP). The ISFET structure is fabricated by a standard CMOS technology on a phosphorus-doped Si (111) wafer with ρ = 4....

Full description

Saved in:
Bibliographic Details
Published in:Microelectronic engineering 2019-07, Vol.215, p.110993, Article 110993
Main Authors: Kutova, Oksana, Dusheiko, Mykhailo, Klyui, Nickolai I., Skryshevsky, Valeriy A.
Format: Article
Language:English
Subjects:
Antigens
Atomic force microscopy
Biosensor
Biosensors
Biotin
C-reactive protein
Cerium oxide film
Cerium oxides
CMOS
Dendritic structure
Dielectric properties
Dielectrics
Field effect transistors
Melanin
Metal fabrication
Optical microscopy
Phosphorus
Proteins
Semiconductor devices
Sensors
Silicon dioxide
Streptavidin
р-Channel ISFET
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper considers a new biosensor based on p-channel ion sensitive field effect transistors (ISFET) as a sensitive platform for low concentration detection of C-reactive protein (CRP). The ISFET structure is fabricated by a standard CMOS technology on a phosphorus-doped Si (111) wafer with ρ = 4.5 Ω.cm. A complex layer of gate dielectric SiO2-CeO2 (dSiO2 = 50 nm, dCeO2 = 10 nm) is chosen since such layers have previously proven their suitability and are technologically simple to manufacture. To improve the antigen binding to the sensitive surface, streptavidin and biotin with and without melanin agents are immobilized on the gate dielectric. Optical microscopy, SEM and AFM results showed that the immobilized streptavidin and biotin agents form porous dendrite structure. The limit of CRP detection is 0.1 mg/L, the range of measuring CRP concentrations is 0.1–2.5 mg/L, the measurement time is about 1 min, and the required amount of solution for analysis - 20 μL. The application of the sensor was evaluated using real samples of human blood serum. [Display omitted] •p-channel Si ISFET with a CeO2 gate dielectric was developed.•Streptavidin and biotin agents were immobilized on the gate dielectric for CRP biosensor.•The limit of detection is 0.1 mg/L, the range of measuring CRP concentrations is 0.1–2.5 mg/L.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2019.110993