A Silicon MEMS EM vibration energy harvester

This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The h...

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Bibliographic Details
Published in:arXiv.org 2019-10
Main Authors: Yang, Y, Radhakrishna, U, Ward, D, Chandrakasan, A P, Lang, J H
Format: Article
Language:English
Subjects:
Coils
Energy harvesting
Load matching
Magnets
Microscopes
Open circuit voltage
Optimization
Production planning
Silicon
Three dimensional printing
Vibration monitoring
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Summary:This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz.
ISSN:2331-8422
DOI:10.48550/arxiv.1910.02131