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Anomalously Beneficial Gate-Length Scaling Trend of Negative Capacitance Transistors
The Negative Capacitance Field Effect Transistors exhibit excellent SS and DIBL improvements from the control MOSFET devices at very short gate lengths, a phenomenon which cannot be explained using conventional MOSFET theory. This benefit arises from an effect which acts similarly to decreasing the...
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Published in: | IEEE electron device letters 2019-11, Vol.40 (11), p.1860-1863 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The Negative Capacitance Field Effect Transistors exhibit excellent SS and DIBL improvements from the control MOSFET devices at very short gate lengths, a phenomenon which cannot be explained using conventional MOSFET theory. This benefit arises from an effect which acts similarly to decreasing the equivalent-oxide thickness at short gate lengths. The effect is observed in both TCAD simulations and experiments, and is explained by the conjunction of the source/drain inner fringing field and the nonlinear polarizability of ferroelectric materials. The results present a sharp contrast to conventional scaling theory and bode well for extending the MOSFET gate length scaling limit. |
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ISSN: | 0741-3106 1558-0563 |
DOI: | 10.1109/LED.2019.2940715 |