Hydrothermally-Grown TiO2 Thin Film-Based Metal–Semiconductor–Metal UV Photodetector

• Published in: Journal of electronic materials 2020, Vol.49 (1), p.499-509
• Main Authors: Kumbhar, S. M., Shaikh, S. K., Rajpure, K. Y.
• Format: Article
• Language: English
• Subjects: Characterization and Evaluation of Materials; Chemistry and Materials Science; Contact resistance; Crystal structure; Electronics and Microelectronics; Instrumentation; Materials Science; Optical and Electronic Materials; Optical switching; Photoelectric effect; Photoelectric emission; Photometers; Preferred orientation; Semiconductor junctions; Solid State Physics; Thin films; Titanium dioxide; Ultraviolet detectors
• ISSN: 0361-5235; 1543-186X
• DOI: 10.1007/s11664-019-07706-5

A metal–semiconductor–metal (MSM) ultraviolet photodetector has been fabricated by using hydrothermally-grown TiO 2 thin films. Ag paint was used as a contact electrode which showed the good ohmic contact between the metal–semiconductor junctions. The effect of deposition time on the structural, morphological and photodetector properties have been studied. The prepared TiO 2 thin films are polycrystalline and show a rutile crystal structure with the preferred orientation along the (110) plane. The MSM UV photodetector was illuminated under a UV lamp with an intensity of 1.8 μW/cm 2 and at 5-V bias. The photocurrent of the device increased linearly with the applied voltage. The maximum photocurrent of 3.96 μA was obtained for the film deposited at 5 h and maximum spectral photoresponsivity was 13.29 A/W. The device showed a fast optical switching behavior. The high responsivity and fast photoresponse shows that fabricated TiO 2 detectors are good candidates for ultraviolet photodetectors.