Full-field analysis of wavefront errors in point diffraction interferometer with misaligned Gaussian incidence

The precision and accuracy of profile measurement achieved by a point diffraction interferometer (PDI) is determined by a spherical diffraction reference wavefront whose quality is mainly controlled by the pinhole's alignment. In consideration of a Gaussian beam incidence, different diffraction...

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Bibliographic Details
Published in:Applied optics (2004) 2020-01, Vol.59 (1), p.210
Main Authors: Gao, Fen, O'Donoghue, Thomas, Wang, Wei
Format: Article
Language:English
Subjects:
Accuracy
Computer simulation
Diffraction
Evaluation
Gaussian beams (optics)
Incidence
Misalignment
Pinholes
Profile measurement
Spherical coordinates
Wave fronts
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Summary:The precision and accuracy of profile measurement achieved by a point diffraction interferometer (PDI) is determined by a spherical diffraction reference wavefront whose quality is mainly controlled by the pinhole's alignment. In consideration of a Gaussian beam incidence, different diffraction wavefront errors stemming from misalignment of pinhole including lateral shift, defocus, and tilt are analyzed with the help of a proposed systematic model and a new evaluation criterion established under spherical coordinates. The full-field distributions of various diffraction wavefront errors are obtained through simulation. The predicted accuracy of an actual PDI makes a good agreement with the experiment results. The achieved results will be beneficial to the accuracy evaluation of a PDI before and after its design.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.59.000210