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On-chip optical spectrometer based on GaN wavelength-selective nanostructural absorbers
A spectrometer concept based on wavelength-selective semiconductor photodiodes is proposed and demonstrated. The absorption properties of individual photodiodes were tuned via local strain engineering in nanostructured InGaN/GaN. By varying the diameters of individual nanopillars, the cutoff wavelen...
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Published in: | Applied physics letters 2020-02, Vol.116 (8) |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A spectrometer concept based on wavelength-selective semiconductor photodiodes is proposed and demonstrated. The absorption properties of individual photodiodes were tuned via local strain engineering in nanostructured InGaN/GaN. By varying the diameters of individual nanopillars, the cutoff wavelengths of absorption were varied across the chip. The intrinsic wavelength selectivity is insensitive to the incident angle of light. The top-down fabrication process shown in this work is also compatible with scalable manufacturing. A proof-of-concept spectrometer was demonstrated based on 14 photodiodes, without any external optics or spectral filtering components, in the wavelength range of 450–590 nm. Using a non-negative least squares algorithm enhanced by orthogonal matching pursuit, the spectrum of a test light source was reconstructed. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.5143114 |