Observation of room-temperature superparamagnetic behavior of Fe5Si3 nanocrystals synthesized via 50 keV Fe ion implantation in silicon

Nanocrystalline Fe 5 Si 3 structures embedded within the top 50 nm of Si substrate have been synthesized via low-energy (50 keV) Fe − ion implantation and subsequent thermal annealing in vacuum at 500 °C for 1 h. Prior to the ion irradiation, the distribution of the implanted ions and sputtering of...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2020-03, Vol.126 (3), Article 232
Main Authors: Singh, Satyabrata, Young, Joshua M., Jones, Daniel C., Berman, Diana, Rout, Bibhudutta
Format: Article
Language:English
Subjects:
Applied physics
Characterization and Evaluation of Materials
Computer simulation
Condensed Matter Physics
Diffraction patterns
Fluence
Ion beams
Ion etching
Ion implantation
Ion irradiation
Iron
Machines
Manufacturing
Materials science
Nanocrystals
Nanotechnology
Optical and Electronic Materials
Photoelectrons
Physics
Physics and Astronomy
Processes
Room temperature
Silicon substrates
Spectrum analysis
Surfaces and Interfaces
Thin Films
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Summary:Nanocrystalline Fe 5 Si 3 structures embedded within the top 50 nm of Si substrate have been synthesized via low-energy (50 keV) Fe − ion implantation and subsequent thermal annealing in vacuum at 500 °C for 1 h. Prior to the ion irradiation, the distribution of the implanted ions and sputtering of the implanted and target atoms were modeled using both static and dynamic ion solid interaction simulation codes in order to determine the desired ion implantation experimental parameters. The simulation showed that for a 50 keV Fe ion beam, the concentration of the Fe reaches a saturation value of 48% at a fluence ~ 2 × 10 17  ions/cm 2 , while distributed within the top 60 nm from the surface of the Si substrate. Depth profile utilizing X-ray photoelectron spectroscopy spectra along with Ar-ion etching shows the presence of Fe ions buried under the surface of Si. X-ray diffraction pattern confirms the presence of crystalline Fe 5 Si 3 in Si. In the vibrating sample magnetometer analysis, the synthesized Fe 5 Si 3 nanocrystal structures show superparamagnetic behavior with very low magnetization at room temperature.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-020-3417-8