Determination of Spatial Distributions of Plasma Parameters of a Compact Magnetron Discharge

In this paper, the hardware-software high resolution measuring system for studying the spatial and spectral distributions of the radiation intensity of a magnetron discharge is described. The emission spectra are recorded and processed for subsequent determination of the temperature and density of p...

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Bibliographic Details
Published in:Physics of atomic nuclei 2019-12, Vol.82 (10), p.1376-1381
Main Authors: Gradov, V. M., Zimin, A. M., Serushkin, S. V., Zemtsov, I. A.
Format: Article
Language:English
Subjects:
Boltzmann distribution
Discharge
Electron density
Emission spectra
Energy distribution
Energy levels
Engineering Design of Nuclear Physics Equipment
Ionization
Mathematical analysis
Parameters
Particle and Nuclear Physics
Physics
Physics and Astronomy
Spatial distribution
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Summary:In this paper, the hardware-software high resolution measuring system for studying the spatial and spectral distributions of the radiation intensity of a magnetron discharge is described. The emission spectra are recorded and processed for subsequent determination of the temperature and density of plasma electrons. These parameters are calculated on the basis of a technique suggesting the absence of ionization equilibrium and the Boltzmann distribution of populations of energy levels of the plasma-forming gas. The data on the electron density, atomic distributions by excited states, and the degree of their deviation from equilibrium in the entire volume of the discharge are presented.
ISSN:1063-7788
1562-692X
DOI:10.1134/S1063778819100107