Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices

The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23...

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Bibliographic Details
Published in:Physics of atomic nuclei 2019-12, Vol.82 (11), p.1508-1512
Main Authors: Oblov, K. Yu, Samotaev, N. N., Etrekova, M. O., Gorshkova, A. V.
Format: Article
Language:English
Subjects:
Ceramic materials
Ceramics
Engineering Design of Nuclear Physics Equipment
Form factors
Microelectromechanical systems
Nuclear energy
Nuclear facilities
Particle and Nuclear Physics
Physics
Physics and Astronomy
Sensors
Surface-mounted devices
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Description
Summary:The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of MEMS sensor in the SMD with form factor of SOT-23 package type.
ISSN:1063-7788
1562-692X
DOI:10.1134/S1063778819110152