Effects of flexural vibration and thickness vibration on receiving characteristics of a diaphragm-type PZT resonator

The piezoelectric micromachined ultrasonic transducer (PMUT) is increasingly being used in medical applications with the development of microelectromechanical system technology. The PMUT generates flexural vibration depending on its structure, but there is also thickness vibration depending on the f...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2020-07, Vol.59 (SK), p.SKKE10
Main Authors: Suzuki, Masatoshi, Tagawa, Norio, Yoshizawa, Masasumi, Irie, Takasuke
Format: Article
Language:English
Subjects:
Damping
Film thickness
Finite element method
Lead zirconate titanates
Microelectromechanical systems
Micromachining
Piezoelectricity
PMUT
Pulse duration
Resonators
Thickening
Ultrasonic transducers
ultrasound
ultrasound transducers
Vibration
Waveforms
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Summary:The piezoelectric micromachined ultrasonic transducer (PMUT) is increasingly being used in medical applications with the development of microelectromechanical system technology. The PMUT generates flexural vibration depending on its structure, but there is also thickness vibration depending on the film thickness of the resonator. This paper clarifies the effect of each vibration on the PMUT reception characteristics. Two approaches that may weaken flexural vibration are investigated in finite element simulation. One is thickening the support layer to increase the damping function. The other is increasing the thickness vibration by thickening the lead zirconate titanate (PZT) layer. Results reveal that flexural vibration is strongly related to ringing in the received waveform, owing to flexural vibration generating rapid phase changes in the frequency domain. Meanwhile, thickness vibration, the degree of which depends on the thickness of the PZT layer, is confirmed to affect the pulse width but be less relevant to ringing.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/ab80a0