Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques

• Published in: Applied optics (2004) 2020-05, Vol.59 (13), p.3910
• Main Authors: Béguelin, Jeremy, Noell, Wilfried, Scharf, Toralf, Voelkel, Reinhard
• Format: Article
• Language: English
• Subjects: Conical bodies; Micro-optics; Microlenses; Optics; Representations
• ISSN: 1559-128X; 2155-3165
• DOI: 10.1364/AO.388453

Tolerancing is an important step toward the fabrication of high-quality and cost-effective lens surfaces. It is critical for wafer-level optics, when up to tens of thousands microlenses are fabricated in parallel and whose surfaces cannot be formed individually. However, approaches developed for macro-optics cannot be directly transposed for microlenses because of differences in fabrication and testing techniques. In particular, microlens surfaces are usually limited to conical surfaces. Here, we study the connection between the microlens optical performance and the form of its surface, suggesting surface form representations suited for tolerancing purposes. Then, we compare them with common representations for tolerancing real optical systems. Measured surface forms of microlenses are also provided to make the tolerancing procedure realistic. In addition, we propose term definitions for micro-optics, complements to typical terms for macro-optics, to ease the communication between optical designers and manufacturers. Based on the results presented in this paper, guidelines are proposed for tolerancing microlenses. We suggest applying them as a first step toward a more effective and comprehensive tolerancing procedure.