Control of ablation morphology on Cu film with tailored femtosecond pulse trains

The ablation morphology of Cu film is investigated using tailored femtosecond pulse trains. The width, depth, and structure of ablation craters are systematically analyzed as the function of sub-pulse interval. Two distinct ablation sub-structures are observed. The gentle slope irradiated by low flu...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2020-06, Vol.126 (6), Article 425
Main Authors: Deng, Jiannan, Qi, Hongxia, Zhao, Liang, Liu, Xinyi, Lian, Zhenzhong, Tong, Qiunan, He, Juntong, Jin, Chuanlin, Li, Juan, Bo, Jinqiu, Fei, Dehou, Chen, Zhou, Hu, Zhan
Format: Article
Language:English
Subjects:
Ablation
Applied physics
Characterization and Evaluation of Materials
Condensed Matter Physics
Curve fitting
Femtosecond pulses
Fluence
Machines
Manufacturing
Materials science
Metal films
Morphology
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Shielding
Surfaces and Interfaces
Thin Films
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Summary:The ablation morphology of Cu film is investigated using tailored femtosecond pulse trains. The width, depth, and structure of ablation craters are systematically analyzed as the function of sub-pulse interval. Two distinct ablation sub-structures are observed. The gentle slope irradiated by low fluence emerges from the peripheral region of the ablation crater, and the steep slope formed in the central region is irradiated by high fluence. The ablation morphology can be controlled by manipulating the shaped pulse trains. We demonstrate that the ablation depth modulation is significant with the ablation width almost unchanged. By fitting the depth curves, we define a coefficient K to characterize the plasma shielding effect between sub-pulses with the increase in sub-pulse interval. For three fluences, the coefficient K using two kinds of pulse trains are extracted experimentally. The results reveal that the plasma shielding effect can be modulated by changing sub-pulse interval, and the corresponding physical interpretation is proposed.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-020-03589-0