AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features ad...

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Bibliographic Details
Published in:Microscopy today 2020-05, Vol.28 (3), p.38-46
Main Authors: Novotna, Veronika, Horak, Josef, Konecny, Martin, Hegrova, Veronika, Novotny, Ondrej, Novacek, Zdenek, Neuman, Jan
Format: Magazinearticle
Language:English
Subjects:
Atomic force microscopes
Atomic force microscopy
Ion beams
Mechanical properties
Microscopes
Nanoindentation
Scanners
Scanning electron microscopy
Spectrum analysis
Surface analysis (chemical)
Topography
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Summary:Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.
ISSN:1551-9295
2150-3583
DOI:10.1017/S1551929520000875