Influence of surface treatment on the structure and properties of proton-exchanged waveguides in lithium niobate

The influence of reverse proton exchange (RPE) and some types of surface pretreatment (exposure to Piranha or RCA-1 solutions or to HNO3+HF mixture) on the structure and properties of proton-exchanged layers has been studied in X-cut lithium niobate (LN). It has been shown that the rate of phase tra...

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Bibliographic Details
Published in:Ferroelectrics 2020-01, Vol.557 (1), p.13-20
Main Authors: Mushinsky, Sergey S, Petukhov, Igor V, Kichigin, Vladimir I, Semenova, Oksana R, Volyntsev, Anatoliy B
Format: Article
Language:English
Subjects:
Exchanging
Lithium
Lithium niobates
Phase transitions
Pretreatment
Protons
Refractivity
Surface pretreatments
Surface treatment
Waveguides
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Summary:The influence of reverse proton exchange (RPE) and some types of surface pretreatment (exposure to Piranha or RCA-1 solutions or to HNO3+HF mixture) on the structure and properties of proton-exchanged layers has been studied in X-cut lithium niobate (LN). It has been shown that the rate of phase transitions in PE layers during RPE is greater than that during annealing at the same temperature. Pretreatment of LN surface before PE by Piranha or RCA-1 solutions slightly increases refractive index change Δne in the resulting waveguide, whereas pretreatment by HNO3+HF mixture decreases it.
ISSN:0015-0193
1563-5112