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Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference
A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data...
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Published in: | IEEE photonics technology letters 2020-08, Vol.32 (15), p.917-920 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data, we apply Bayesian inference methods to estimate the waveguide geometery parameters and also quantify the uncertainty of the estimates. |
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ISSN: | 1041-1135 1941-0174 |
DOI: | 10.1109/LPT.2020.3004850 |