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Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference

A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data...

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Published in:IEEE photonics technology letters 2020-08, Vol.32 (15), p.917-920
Main Authors: Ong, Jun Rong, Guo, Tina X., Ang, Thomas Y. L., Lim, Soon Thor, Wang, Hong, Png, Ching Eng
Format: Article
Language:English
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Summary:A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data, we apply Bayesian inference methods to estimate the waveguide geometery parameters and also quantify the uncertainty of the estimates.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2020.3004850