High-Gain Ultraviolet Avalanche Photodiodes Using a ZnSe-Based Organic–Inorganic Hybrid Structure

We have developed high-gain and highly sensitive ZnSe-based organic–inorganic hybrid ultraviolet avalanche photodiodes (UV-APDs). The inorganic ZnSe-based wafers (i-ZnSSe active layer/n-ZnSSe) were grown by molecular beam epitaxy (MBE) on n -type GaAs substrates. The inorganic UV-transparent conduct...

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Bibliographic Details
Published in:Journal of electronic materials 2020-08, Vol.49 (8), p.4589-4593
Main Authors: Ichikawa, Yuki, Tanaka, Keita, Nakagawa, Kazuki, Fujii, Yuta, Yoshida, Kentaro, Nakamura, Kaiki, Miyazaki, Ryuichi, Abe, Tomoki, Kasada, Hirofumi, Ichino, Kunio, Akaiwa, Kazuaki
Format: Article
Language:English
Subjects:
19th International Conference on II-VI Compounds and Related Materials
Avalanche diodes
Characterization and Evaluation of Materials
Chemistry and Materials Science
Conducting polymers
Electronics and Microelectronics
Epitaxial growth
Hybrid structures
Inkjet printing
Instrumentation
Leakage current
Materials Science
Molecular beam epitaxy
Multiplication
Optical and Electronic Materials
Photodiodes
Photolithography
Quantum efficiency
Solid State Physics
Spin coating
Substrates
Topical Collection: 19th International Conference on II-VI Compounds
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Summary:We have developed high-gain and highly sensitive ZnSe-based organic–inorganic hybrid ultraviolet avalanche photodiodes (UV-APDs). The inorganic ZnSe-based wafers (i-ZnSSe active layer/n-ZnSSe) were grown by molecular beam epitaxy (MBE) on n -type GaAs substrates. The inorganic UV-transparent conducting polymer window layers of poly 3,4-ethylenedioxythiophene:poly-styrenesulfonate (PEDOT:PSS) were formed by spin-coating and a photolithography technique instead of the inkjet printing technique, which we previously reported. We have obtained a thin uniform window layer with a mesa-shaped edge by an optimized photolithography process. The leakage current before the breakdown voltage was suppressed to
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-020-07970-w