A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation

This paper surveys the recent advances on the modeling and control of hysteresis of piezoelectric actuators (PTAs) in the context of high precision applications of atomic force microscopes (AFMs). The current states, findings, and outcomes on hysteresis modeling and control in terms of achievable ba...

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Bibliographic Details
Published in:International journal of automation and computing 2020-08, Vol.17 (4), p.479-501
Main Authors: Armin, Maniza, Roy, Priyo Nath, Das, Sajal Kumar
Format: Article
Language:English
Subjects:
Atomic force microscopes
Atomic force microscopy
CAE) and Design
Computer Applications
Computer-Aided Engineering (CAD
Control
Engineering
Hysteresis models
Mechatronics
Microscopes
Modelling
Piezoelectric actuators
Piezoelectricity
Review
Robotics
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Summary:This paper surveys the recent advances on the modeling and control of hysteresis of piezoelectric actuators (PTAs) in the context of high precision applications of atomic force microscopes (AFMs). The current states, findings, and outcomes on hysteresis modeling and control in terms of achievable bandwidth and accuracy are discussed in detailed. Future challenges and the scope of possible research are presented to pave the way to video rate atomic force microscopy.
ISSN:1476-8186
1751-8520
DOI:10.1007/s11633-020-1225-4