Fine metal mask material and manufacturing process for high‐resolution active‐matrix organic light‐emitting diode displays

Manufacturing fine metal mask (FMM) is one of the biggest hurdles to realize the ultra‐high definition (UHD) grade AMOLED displays for smartphone and augmented reality (AR). We have developed the state‐of‐the‐art material and processing technology to achieve 800ppi or higher‐resolution FMMs. The Inv...

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Bibliographic Details
Published in:Journal of the Society for Information Display 2020-08, Vol.28 (8), p.668-679
Main Authors: Kim, Chiwoo, Kim, Kisoo, Kwon, Ohseob, Jung, Jaehoon, Park, Jong Kab, Kim, Doh Hoon, Jung, Kiro
Format: Article
Language:English
Subjects:
Active matrix displays
AR (augmented reality)
Augmented reality
chemical etching
Displays
electro‐forming
Ferrous alloys
FMM (fine metal mask)
High definition
Invar
Laser ablation
Laser damage
laser patterning
Low expansion alloys
UHD (ultra‐high definition)
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Summary:Manufacturing fine metal mask (FMM) is one of the biggest hurdles to realize the ultra‐high definition (UHD) grade AMOLED displays for smartphone and augmented reality (AR). We have developed the state‐of‐the‐art material and processing technology to achieve 800ppi or higher‐resolution FMMs. The Invar thinning and the thermal damage‐free laser ablation process realized us achieving the FMM for UHD displays. To make a high‐resolution FMM sticks, we have developed the Invar thinning (Thickness Control Process) and annealing process. The thermal damage‐free laser ablation process enables us to achieve fine patterning with high precision for UHD grade FMM. It is expected that with our high‐resolution FMM sticks, display makers can produce UHD or higher‐resolution AMOLED displays for mobile and AR application in the near future.
ISSN:1071-0922
1938-3657
DOI:10.1002/jsid.901