Challenges and opportunities in MEMS development, assembly and applications

Challenges and opportunities in MEMS development, assembly and applications Article Type: Viewpoint From: Assembly Automation, Volume 33, Issue 2 Micro-Electro-Mechanical Systems (MEMS) are miniaturized mechanical and electro-mechanical devices and structures that are made using micro-fabrication te...

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Bibliographic Details
Published in:Assembly automation 2013-04, Vol.33 (2)
Main Author: Hsieh, Sheng-Jen (Tony)
Format: Article
Language:English
Subjects:
Actuators
Assembly
Automation
Central nervous system
Electromechanical devices
Emergency warning programs
Field of view
Grippers
Locking
Mechanical systems
Medical screening
Microelectromechanical systems
Microscopes
Oil exploration
Optical microscopes
Robotics
Sensors
Smart grid
Structural health monitoring
Supply chains
Online Access:Get full text
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Summary:Challenges and opportunities in MEMS development, assembly and applications Article Type: Viewpoint From: Assembly Automation, Volume 33, Issue 2 Micro-Electro-Mechanical Systems (MEMS) are miniaturized mechanical and electro-mechanical devices and structures that are made using micro-fabrication techniques. Many micro-gripper designs and releasing strategies have also been developed, including vacuum gripper, electrostatic gripper, capillary gripper, van der Waals gripper, vibration release, and snap-locking fixing.Robotic micro-assembly has limitations, including: 2. depth of view and the contradiction between resolution and field of view of optical microscopes; 3. difficulties in implementing force control due to performance of the sensors; and 4. limited space for micro-grippers. 5. MEMS future applications In launching Central Nervous System for the Earth (CeNSE), Hewlett-Packard estimated that about 1 trillion nano sensors and actuators will be deployed for applications such as climate monitoring, oil exploration and production, assets and supply chain tracking, smart highway infrastructure, tsunami and earthquake warning, smart grids and homes, and structural health monitoring.
ISSN:0144-5154
2754-6969
1758-4078
2754-6977
DOI:10.1108/aa.2013.03333baa.001