Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films

The mechanical and tribological characteristics of titanium–aluminum nitride films deposited by the reactive magnetron sputtering of Ti–Al mosaic targets with different aluminum concentrations were studied. The dependences of the elemental composition, microhardness, and friction coefficient on the...

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Bibliographic Details
Published in:Journal of friction and wear 2020-07, Vol.41 (4), p.304-309
Main Authors: Golosov, D. A., Oks, E. M., Burdovitsin, V. A., Nguyen, T. D., Melnikov, S. N., Zavadski, S. M., Pobol, I. L., Kananovich, N. A., Tian, Xiubo, Lam, N. N.
Format: Article
Language:English
Subjects:
Aluminum
Aluminum nitride
Classical and Continuum Physics
Coefficient of friction
Composition
Doping
Friction
Gas mixtures
Magnetron sputtering
Microhardness
Nitrogen
Physics
Physics and Astronomy
Titanium
Tribology
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Summary:The mechanical and tribological characteristics of titanium–aluminum nitride films deposited by the reactive magnetron sputtering of Ti–Al mosaic targets with different aluminum concentrations were studied. The dependences of the elemental composition, microhardness, and friction coefficient on the degree of doping of the films with aluminum and nitrogen concentration in the Ar/N 2 gas mixture during film deposition were obtained. It was found that an increase in the aluminum content in the film results in an increase in film hardness and decrease in the friction coefficient. The optimum nitrogen concentration in the film was achieved at maximum hardness and low values of the friction coefficient. A maximum hardness of 23.5 GPa and a minimum friction coefficient of 0.082 were obtained for films of the composition Ti 5 AlN 1.33 , which had a Ti/Al ratio of 5 : 1 and a nitrogen deficiency.
ISSN:1068-3666
1934-9386
DOI:10.3103/S1068366620040066