Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film

Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device...

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Bibliographic Details
Published in:Advanced functional materials 2020-09, Vol.30 (36), p.n/a
Main Authors: Glinsek, Sebastjan, Mahjoub, Mohamed Aymen, Rupin, Matthieu, Schenk, Tony, Godard, Nicolas, Girod, Stéphanie, Chemin, Jean‐Baptiste, Leturcq, Renaud, Valle, Nathalie, Klein, Sébastien, Chappaz, Cédrick, Defay, Emmanuel
Format: Article
Language:English
Subjects:
Chemical reactions
chemical solution deposition
Friction
Fused silica
Hafnium oxide
Haptic interfaces
Haptics
Indium tin oxides
Lamb waves
Lead zirconate titanates
Materials science
Modulation
Photoresists
Piezoelectricity
piezoelectrics
Silicon dioxide
Substrates
Thin films
transparent electronics
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Summary:Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device based on a piezoelectric thin film is demonstrated. The antisymmetric Lamb mode induced at 73 kHz allows for a functional performance that fulfills all conditions for practical use. Out‐of‐plane displacement reaches 2.9 µm when 150 V unipolar voltage is applied. The average transmittance of the whole transducer reaches 75%. The key points of this technology are: 1) a thin HfO2 layer between lead zirconate titanate film and substrate that prevents chemical reaction between them; 2) the efficient integration of transparent indium tin oxide electrodes and solution‐derived piezoelectric lead zirconate titanate thin film onto optical‐grade fused silica; and 3) the use of a transparent insulating layer made of SU‐8 photoresist. A transparent friction‐modulation haptic device is demonstrated. The stack consists of a fused silica substrate, HfO2 barrier, Pb(Zr,Ti)O3 piezoelectric film, transparent interdigitated indium tin oxide electrodes, and SU‐8 insulating layer. The antisymmetric Lamb mode at 73 kHz allows for a silent functional performance that fulfills conditions for practical use, that is, displacement >1 µm at 60 V.
ISSN:1616-301X
1616-3028
DOI:10.1002/adfm.202003539