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9‐2: Manufacturing Process for Mass Production of Micro‐LED Displays and High‐Speed and High‐Yield Laser Lift‐Off Systems
In our previous work, we proposed and evaluated processes and equipment to facilitate the mass production of micro LED (light emitting diode) displays. The new technologies include LLO (laser lift off), mass‐transfer, color conversion and backplane with micro Si chip. We quantitatively evaluated the...
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Published in: | SID International Symposium Digest of technical papers 2020-08, Vol.51 (1), p.100-103 |
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container_title | SID International Symposium Digest of technical papers |
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creator | Kajiyama, Koichi Suzuki, Yoshikazu Hirano, Takafumi Yanagawa, Yoshikatu Fukaya, Koichiro Okura, Naoya Okuno, Takeshi Shimoura, Atushi |
description | In our previous work, we proposed and evaluated processes and equipment to facilitate the mass production of micro LED (light emitting diode) displays. The new technologies include LLO (laser lift off), mass‐transfer, color conversion and backplane with micro Si chip. We quantitatively evaluated them and report results. |
doi_str_mv | 10.1002/sdtp.13814 |
format | article |
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subjects | Backplanes Display Displays Electric bonding Fluorescence Light emitting diodes LLO Mass production Mass transfer Micro Si chip Micro-LED New technology PWM Reconstitution UV LED |
title | 9‐2: Manufacturing Process for Mass Production of Micro‐LED Displays and High‐Speed and High‐Yield Laser Lift‐Off Systems |
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