An ultra-high-vacuum rotating sample manipulator with cryogenic cooling

We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for...

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Bibliographic Details
Published in:Review of scientific instruments 2020-11, Vol.91 (11), p.116104-116104
Main Authors: Tee, X. Y., Paré, A., Petrović, A. P., Panagopoulos, C.
Format: Article
Language:English
Subjects:
Cryogenic cooling
Cryogenic engineering
Cryogenic temperature
Electric contacts
Rotation
Sample holders
Scientific apparatus & instruments
Wiring
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Summary:We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering.
ISSN:0034-6748
1089-7623
DOI:10.1063/5.0021595