A MEMS Tactile Sensor with Fingerprint-Like Array of Contactors for High Resolution Visualization of Surface Distribution of Tactile Information

• Published in: Journal of robotics and mechatronics 2020-04, Vol.32 (2), p.305-314
• Main Authors: Watatani, Kazuki, Terao, Kyohei, Shimokawa, Fusao, Takao, Hidekuni
• Format: Article
• Language: English
• Subjects: Contactors; Fingerprints; Force distribution; High resolution; Mechanical analysis; Microelectromechanical systems; Modules; Performance evaluation; Sensor arrays; Sensors; Spatial resolution; Stress concentration; Sweeping; Tactile sensors (robotics); Yaw
• ISSN: 0915-3942; 1883-8049
• DOI: 10.20965/jrm.2020.p0305

In the present report, we have developed a tactile sensor with fingerprint-like array of contactors for obtaining the surface distribution of tactile information in high spatial resolutions. Six high resolution sensing modules of contactors with biaxial detectors were integrated in line at a pitch of 500 μm, the typical pitch of fingerprint ridges. Each sensing module independently detected the micro surface shape and locally generated frictional force on the object surfaces. Mechanical analysis of the fabricated sensors showed good sensitivities and highly linear responses. Consequently, the measured detection resolutions of surface shape and frictional force were 0.17 μm and 9.9 μN, respectively. The experimental performance evaluation of fabricated sensor was measured in the distribution of tactile information by sweeping the sensor with a yaw angle. Additionally, the 3D surface shape of weave structure and surface distribution of frictional force in a woven fabric with 0.4 mm pitch of threads in high spatial resolution was clearly visualized/observed. Moreover, the directionality of tactile information of the fabric surface distribution was successfully realized using the tactile sensor with the array of contactors by sweeping in different directions.