A single-projection three-dimensional reconstruction algorithm for scanning transmission electron microscopy data

Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microsc...

Full description

Saved in:
Bibliographic Details
Published in:arXiv.org 2022-02
Main Authors: Brown, Hamish G, Pelz, Philipp M, Shang-Lin, Hsu, Zhang, Zimeng, Ramamoorthy Ramesh, Inzani, Katherine, Sheridan, Evan, Griffin, Sinéad M, Schloz, Marcel, Pekin, Thomas C, Koch, Christoph T, Findlay, Scott D, Allen, Leslie J, Scott, Mary C, Ophus, Colin, Ciston, Jim
Format: Article
Language:English
Subjects:
Algorithms
Data acquisition
Electron microscopes
Epitaxial layers
Heterostructures
Lead
Reconstruction
Scanning electron microscopy
Scanning transmission electron microscopy
Transmission electron microscopy
Yttrium
Zirconium dioxide
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data. We apply the approach to a lead iridate, Pb\(_2\)Ir\(_2\)O\(_7\), and yttrium-stabilized zirconia,Y\(_{0.095}\)Zr\(_{0.905}\)O\(_2\) , heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction. We demonstrate that Pb-Ir atomic columns are visible in the uppermost layers of the reconstructed volume. We compare this approach to the alternative techniques of depth sectioning using differential phase contrast scanning transmission electron microscopy (DPC-STEM) and multislice ptychographic reconstruction.
ISSN:2331-8422