Micromachined Piezoresistive-Sensed Diaphragms for Infrasonic Monitoring

Micromachined, piezoresistive-sensed diaph- ragms are designed and fabricated specifically for infrasound sensing applications. Relatively large diaphragms, up to 6 mm \times6 mm, are fabricated to meet the high sensitivity requirements of infrasonic monitoring. A double-stack SOI wafer process is...

Full description

Saved in:
Bibliographic Details
Published in:IEEE sensors journal 2021-01, Vol.21 (1), p.257-264
Main Authors: Seo, Yoonho, Williams, Randall P., Stalder, Carly A., Kim, Donghwan, Hall, Neal A.
Format: Article
Language:English
Subjects:
Diaphragms
Finite element method
Frequency measurement
Infrasound
Ion implantation
MEMS
Micromachining
Monitoring
Nonlinear response
OTHER INSTRUMENTATION
Piezoresistance
piezoresistive
Piezoresistive devices
Piezoresistivity
pressure sensor
Resistors
Sensitivity
Sensors
Silicon
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Micromachined, piezoresistive-sensed diaph- ragms are designed and fabricated specifically for infrasound sensing applications. Relatively large diaphragms, up to 6 mm \times6 mm, are fabricated to meet the high sensitivity requirements of infrasonic monitoring. A double-stack SOI wafer process is used, resulting in a streamlined two-mask process without the need for doping or ion-implantation. Pressure-sensitivities of diaphragms are studied using a custom static calibration set-up. The piezoresistance of longitudinal and transverse resistors are studied over a large pressure range of ±5,500 Pa so that the linear and nonlinear response regions of diaphragms are observed. Measurements are compared against a nonlinear finite element simulation-shown to accurately predict the sensor's behavior over a large response range.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2020.3014567