Gold-Doped Tin Oxide Film for Highly Sensitive Carbon Monoxide Sensing

This paper presents the development of gold-doped tin oxide (SnO 2 ) film, realized by radiofrequency (RF) sputtering, which is highly sensitive for carbon monoxide (CO) gas. According to the Occupational Safety and Health Administration (OSHA), human exposure to 50 ppm CO is safe up to 8 h (as perm...

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Bibliographic Details
Published in:Journal of electronic materials 2021-02, Vol.50 (2), p.554-561
Main Authors: Prajesh, Rahul, Nahid, Mohd, Saini, Vikas, Goyal, Vinay, Sharma, Ashok, Bhargava, Jitendra, Agarwal, Ajay
Format: Article
Language:English
Subjects:
Carbon monoxide
Characterization and Evaluation of Materials
Chemistry and Materials Science
Electronics and Microelectronics
Exposure limits
Field emission microscopy
Gold
Image enhancement
Instrumentation
Low concentrations
Materials Science
Nausea
Occupational safety
Operating temperature
Optical and Electronic Materials
Original Research Article
Oxide coatings
Radio frequency
Respiration
Solid State Physics
Sputtering
Thin films
Tin
Tin dioxide
Tin oxides
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Summary:This paper presents the development of gold-doped tin oxide (SnO 2 ) film, realized by radiofrequency (RF) sputtering, which is highly sensitive for carbon monoxide (CO) gas. According to the Occupational Safety and Health Administration (OSHA), human exposure to 50 ppm CO is safe up to 8 h (as permissible exposure limit), but inhalation of higher concentrations of CO can cause headache, dizziness, nausea, etc. Hence, it is imperative to detect CO gas in low concentrations. The receptor films were prepared via reactive co-sputtering of high-purity Sn and Au targets and characterized by x-ray diffraction (XRD), which confirmed the presence of SnO 2 and gold. The thin films of pristine SnO 2 and gold-doped SnO 2 were also examined through field emission scanning electron microscopy (FESEM) images, showing the distinction in their structures. A reasonably enhanced response of ~ 56.4% was exhibited by gold-doped SnO 2 compared to 15.5% for pristine SnO 2 for 50 ppm CO at operating temperature of each film.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-020-08613-w