Optical-Electrical Properties and Thickness Analysis of TiO2 Thin Films Obtained by Magnetron Sputtering

The study of thin films with properties that meet specific needs and improve people’s quality of life has been the focus of many researchers. However, knowing and controlling the production techniques of these films have been a challenge for the industry of optical-electronic devices, functional coa...

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Bibliographic Details
Published in:Brazilian journal of physics 2020-12, Vol.50 (6), p.771-779
Main Authors: Sobrinho, V. S. S., Neto, J. Q. M., Lima, L. L. F., Souza, I. A., Libório, M. S., Queiroz, J. C. A., Sousa, R. R. M., Almeida, E. O., Feitor, M. C., Costa, T. H. C.
Format: Article
Language:English
Subjects:
Electrical properties
Electronic devices
General and Applied Physics
Interference fringes
Magnetic properties
Magnetron sputtering
Microscopy
Optical properties
Physics
Physics and Astronomy
Plasma deposition
Thickness measurement
Thin films
Titanium dioxide
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Summary:The study of thin films with properties that meet specific needs and improve people’s quality of life has been the focus of many researchers. However, knowing and controlling the production techniques of these films have been a challenge for the industry of optical-electronic devices, functional coatings, and energy conservation. The thickness of thin films is a parameter that influences the optical and electrical characteristics of these materials, thus being one of the most important information in the plasma deposition process. Because of the need for precision in measuring the thickness of thin transparent films, this work proposes to evaluate the Swanepoel methods (envelope) and the PUMA, computational method, from optical transmittance curves and compare them with the measurements directly made by microscopy. Scanning electronics for thin films of TiO 2 deposited by magnetron sputtering in different conditions. The results of this study showed that the PUMA method is capable of calculating film thicknesses of a few hundred nanometers and with few interference fringes. The PUMA method showed convergence with high precision for films produced with 30 and 60 min of treatment and a difference of 17% for films with 120 min of deposition concerning the measurements made by microscopy.
ISSN:0103-9733
1678-4448
DOI:10.1007/s13538-020-00794-3