Influence of sputtered time on the structural and optical characterization of Al-doped ZnO thin films prepared by RF sputtering technique

In this project, aluminum doped zinc oxide thin films were deposited on glass substrate by the RF sputtering technique. The consequence of sputtered time on the structural and optical characteristics was evaluated. The optical parameter values were determined by ultra violet visible spectroscopy tha...

Full description

Saved in:
Bibliographic Details
Published in:Optical and quantum electronics 2021, Vol.53 (1), Article 14
Main Authors: Ghobadi, Nader, Shiravand, Mahdiyeh, Hatam, Ebrahim Gholami
Format: Article
Language:English
Subjects:
Aluminum
Characterization and Evaluation of Materials
Computer Communication Networks
Electrical Engineering
Glass substrates
Lasers
Optical Devices
Optical properties
Optics
Parameters
Photonics
Physics
Physics and Astronomy
Refractivity
Sputtering
Structural analysis
Thickness
Thin films
Zinc oxide
Zinc oxides
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this project, aluminum doped zinc oxide thin films were deposited on glass substrate by the RF sputtering technique. The consequence of sputtered time on the structural and optical characteristics was evaluated. The optical parameter values were determined by ultra violet visible spectroscopy that the nature of optical transitions reveals direct allowed transition for all AZO thin films. Also, some physical quantities such as the Urbach tail energy, refractive index (n) in the edge of absorption and dielectric constant (ε) were reported for the AZO thin films with various sputtered time. Derivation ineffective thickness method (DITM) was employed to the optical band gap determination and transition index without any presumption about transition natural. Time of reaction plays an essential role in controlling the physical quantities of thin films. This parameter helps to obtain the optimal thickness.
ISSN:0306-8919
1572-817X
DOI:10.1007/s11082-020-02687-w