Progress and perspectives in high-purity substance production for semiconductor industry

In the last decade, novel approaches for post-synthesis processes of separation and high purification of gases are gaining larger acceptance in industry. The market is competing with consolidated operations such as cryogenic distillation. The key for new approaches of distillation, membranes and cry...

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Bibliographic Details
Published in:Reviews in chemical engineering 2021-01, Vol.37 (1), p.125-161
Main Authors: Vorotyntsev, Andrey V., Petukhov, Anton N., Trubyanov, Maxim M., Atlaskin, Artem A., Makarov, Dmitriy A., Sergeeva, Maria S., Vorotyntsev, Ilya V., Vorotyntsev, Vladimir M.
Format: Article
Language:English
Subjects:
catalysis
Chemical synthesis
Competition
Crystallization
Distillation
membrane gas separation
Membranes
nanoparticles
Purification
Separation
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Summary:In the last decade, novel approaches for post-synthesis processes of separation and high purification of gases are gaining larger acceptance in industry. The market is competing with consolidated operations such as cryogenic distillation. The key for new approaches of distillation, membranes and crystallization in challenging and harsh environments is the development of new tough, high-performance materials that are characterized by higher energy efficiency compared with conventional cryogenic distillation. This review highlights the most promising fields of research in high purification and separation of gases by considering the elevated pressure and thermal distillations, membrane cascades, purification in synthesis by use of catalytic technologies, crystallization and hydride methods based on them.
ISSN:0167-8299
2191-0235
DOI:10.1515/revce-2018-0046