A Novel Nano Tomography Setup for Material Science and Engineering Applications

In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell Correlation of 3D volumes. As representative application examples...

Full description

Saved in:
Bibliographic Details
Published in:arXiv.org 2021-02
Main Authors: Müller, Dominik, Graetz, Jonas, Balles, Andreas, Stier, Simon, Hanke, Randolf, Fella, Christian
Format: Article
Language:English
Subjects:
Aging (metallurgy)
Computed tomography
Integrated circuits
Laboratories
Lithium batteries
Metallizing
Multilayers
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell Correlation of 3D volumes. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, ageing in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of com-posites. Thus, our laboratory system provides the unique possibility to image non-destructively struc-tures in the range of hundred nanometers, even for high density materials.
ISSN:2331-8422