Thin‐film deposition by combining plasma jet with spark discharge source at atmospheric pressure

• Published in: Contributions to plasma physics (1988) 2021-03, Vol.61 (3), p.n/a
• Main Authors: Ussenov, Yerbolat A., Toktamyssova, Moldir T., Dosbolayev, Merlan K., Gabdullin, Maratbek T., Daniyarov, Talgat T., Ramazanov, Tlekkabul S.
• Format: Article
• Language: English
• Subjects: Atmospheric pressure; atmospheric pressure plasma jet; Condensates; Copper; Deposition; dielectric barrier discharge; Electric sparks; Electrodes; Electron microscopes; Emission measurements; Emission spectra; Evaporation; low‐temperature atmospheric‐pressure plasma; Plasma; Plasma jets; Raman spectroscopy; Scanning electron microscopy; spark discharge; Spectroscopy; Spectrum analysis; Substrates; thin film deposition; Thin films
• ISSN: 0863-1042; 1521-3986
• DOI: 10.1002/ctpp.202000140

This study demonstrates a method for the deposition of CuOx thin films by combining atmospheric pressure plasma jet with spark discharge. In this type of discharge source, the bulk copper material of spark discharge electrodes plays the role of a precursor. Copper atoms and particles go through the physical processes of sputtering, evaporation, and further agglomeration and condensation in the plasma jet and on the substrate. The experiments were carried out with and without a combination of discharges. The material coated on the substrate was studied using a scanning electron microscope, Raman spectroscopy, and energy‐dispersive X‐ray spectroscopy. The characteristics of the set‐up and plasma, such as I‐V curves, optical emission spectra, and substrate temperature, were also measured. Copper electrodes were examined for erosion by a scanning electron microscope. The results demonstrate that deposits coated by combined discharge show denser and thicker films.