Optical Transmittance Improvements of Al2O3/TiO2 Multilayer OLED Encapsulation Films Processed by Atomic Layer Deposition

Encapsulation of organic light-emitting diodes (OLEDs) is the only way to prevent degradation due to the penetration of moisture and oxygen. However, the upper encapsulation layer, located in the path through which light from the OLED passes, adversely affects light transmission. In this study, we c...

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Bibliographic Details
Published in:Journal of electronic materials 2021-04, Vol.50 (4), p.2015-2020
Main Authors: Shin, Se-Un, Ryu, Sang Ouk
Format: Article
Language:English
Subjects:
Aluminum oxide
Atomic layer epitaxy
Characterization and Evaluation of Materials
Chemistry and Materials Science
Electrical engineering
Electrical impedance
Electronics and Microelectronics
Encapsulation
Instrumentation
Light emitting diodes
Light transmission
Materials Science
Multilayers
Optical and Electronic Materials
Organic light emitting diodes
Original Research Article
Simulation
Solid State Physics
Thin films
Titanium dioxide
Transmittance
Water vapor
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Summary:Encapsulation of organic light-emitting diodes (OLEDs) is the only way to prevent degradation due to the penetration of moisture and oxygen. However, the upper encapsulation layer, located in the path through which light from the OLED passes, adversely affects light transmission. In this study, we calculated the optical transmittance by using admittance trajectory simulation and compared the data with actual Al 2 O 3 /TiO 2 multilayer film processed by atomic layer deposition (ALD). By applying the simulated data on to actual encapsulation layer, we can observe the optical transmittance increase of up to 8% compared to the film of Al 2 O 3 /TiO 2 /Al 2 O 3 structure. Over 90% of optical transmittance was achieved for all the visible wavelength ranges while maintaining water vapor transmission rate (WVTR) of the processed multilayer thin film as low as of 5 × 10 −5 g/m 2 /day, which was measured using MOCON Aquatran 2.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-020-08731-5