Structural analysis of TaWN ternary alloy film applicable to Cu orientation control

We examine a structure/texture of a thin TaWN film applicable to the Cu(111) orientation by using automated crystal orientation mapping in transmission electron microscopy. The 5 nm thick TaWN film with an fcc-TaN structure shows (111) orientation in spite of being extremely thin. This orientation o...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2021-05, Vol.60 (SB), p.SBBC04
Main Authors: Takeyama, Mayumi B., Yasuda, Mitsunobu, Sato, Masaru
Format: Article
Language:English
Subjects:
Crystal structure
Grain size
Orientation
Structural analysis
Ternary alloys
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Summary:We examine a structure/texture of a thin TaWN film applicable to the Cu(111) orientation by using automated crystal orientation mapping in transmission electron microscopy. The 5 nm thick TaWN film with an fcc-TaN structure shows (111) orientation in spite of being extremely thin. This orientation of the TaWN film results in highly-oriented growth of Cu (111), and also contributes to the increase in Cu grain size. Such structural features have useful that effectively prevent an increase in the resistance of the Cu interconnect.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/abebbd