Influence of magnetron sputtering modes of aluminum and aluminum nitride films on their surface, structure and composition

To ensure the optimal combination of the properties of the thin-film layers of piezoelectric structures and achieve the required characteristics of resonators and devices for selecting and generating of the signals based on them, the influence of technological modes of aluminum nitride films formati...

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Bibliographic Details
Published in:Journal of physics. Conference series 2021-04, Vol.1870 (1), p.12023
Main Authors: Baranova, L V, Strunin, V I, Chirikov, N. A.
Format: Article
Language:English
Subjects:
Acoustic waves
Aluminum
Aluminum nitride
Composition
Magnetron sputtering
Morphology
Physics
Piezoelectric transducers
Resonators
Thin films
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Summary:To ensure the optimal combination of the properties of the thin-film layers of piezoelectric structures and achieve the required characteristics of resonators and devices for selecting and generating of the signals based on them, the influence of technological modes of aluminum nitride films formation on the surface morphology, structure and elemental composition of films used in the construction of microelectronic bulk acoustic waves (BAW) resonator with Bragg reflector, the optimal modes are determined that satisfy the requirements for film layers for a piezoelectric transducer and Bragg reflector.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1870/1/012023