Microstructure of BaFe12O19 Nanofilms Produced on Silicon Substrates with Various Amorphous Sublayers

BaFe 12 O 19 nanofilms with uniaxial texture have been synthesized by ion-beam deposition with subsequent annealing. Silicon wafers with sublayers of amorphous alumina (Al 2 O 3 ), silicon nitride (Si 3 N 4 ), and their combinations have been used as substrates. The films have been studied by X-ray...

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Bibliographic Details
Published in:Russian journal of inorganic chemistry 2021-04, Vol.66 (4), p.603-607
Main Authors: Kostishin, V. G., Mironovich, A. Yu, Timofeev, A. V., Shakirzyanov, R. I., Isaev, I. M., Kurochka, A. S., Ril’, A. I., Sergienko, A. A.
Format: Article
Language:English
Subjects:
Alumina-Silicon nitride
Aluminum oxide
Annealing
Atomic force microscopy
Barium hexaferrite
Chemical synthesis
Chemistry
Chemistry and Materials Science
Crystallization
Inorganic Chemistry
Inorganic Materials and Nanomaterials
Ion beams
Silicon nitride
Silicon substrates
Silicon wafers
Texture
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Summary:BaFe 12 O 19 nanofilms with uniaxial texture have been synthesized by ion-beam deposition with subsequent annealing. Silicon wafers with sublayers of amorphous alumina (Al 2 O 3 ), silicon nitride (Si 3 N 4 ), and their combinations have been used as substrates. The films have been studied by X-ray diffraction and atomic force microscopy. It has been confirmed that hexaferrite with its c axis perpendicular to the plane of the substrate is spontaneously formed on the amorphous surface of Al 2 O 3 /Si 3 N 4 /Si. The BaFe 12 O 19 films grown on Si 3 N 4 sublayers are characterized by the presence of high strain, leading to the destruction of the ferrite coating after crystallization annealing. The annealed BaFe 12 O 19 /Al 2 O 3 /Si sample contained additional phases; no signs of the (00 l ) hexaferrite texture were found.
ISSN:0036-0236
1531-8613
DOI:10.1134/S003602362104015X